CVD Reactor Conclusions
Real commercial processes are always a balance between cost and quality. We're always making tradeoffs:
- uniformity vs. throughput
- film quality vs. throughput
- film quality vs. precursor cost
- versatility vs. reactor cost
The tradeoffs can be made more sensibly when we know what affects reactor operation:
- diffusion vs. convection
- surface reaction vs. transport
- radiation vs. conduction
- high pressure (speed but dust) or low pressure (uniform but slow)
AND...There's Always a Scapegoat: In the last resort, blame the reactor vendor. They're used to it.
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