Focused reviews of specialized topics in film deposition and IC fabrication. Old but often still interesting, or at least nostalgic...
- Boron and Phosphorus Diffusion in Silicon Dioxide and Oxynitrides
- Moisture Barrier Effects in Deposited Oxides
- Gettering and Transport of Mobile Ions
- Fixed Charge in Deposited Oxides
- Self-Aligned Contacts and Etch Stop Layers
- Field-Emission Flat Panel Display Manufacturing Tutorial