Selected Shorts

Focused reviews of specialized topics in film deposition and IC fabrication. Old but often still interesting, or at least nostalgic...

• Boron and Phosphorus Diffusion in Silicon Dioxide and Oxynitrides
• Moisture Barrier Effects in Deposited Oxides
• Gettering and Transport of Mobile Ions
• Fixed Charge in Deposited Oxides
• Self-Aligned Contacts and Etch Stop Layers
• Field-Emission Flat Panel Display Manufacturing Tutorial