CVD Films

There are innumerable films and precursors for CVD. In this survey, we’ll cover a few films that are important in semiconductor manufacturing and related fields.

Silicon Dioxide and Doped Glasses

• Film Properties and Applications
• Silane/Oxygen Thermal CVD
• TEOS/Oxygen Thermal CVD
• TEOS/Ozone Thermal CVD
• Silane/N2O PECVD
• TEOS/O2 PECVD
• High-Density Plasma CVD

Silicon Nitride

• Film Properties and Applications
• Silicon Nitride Thermal CVD
• Silicon Nitride Plasma CVD

Low-K and High-K Dielectrics

• Fluorine and Methyl in Silica
• Tantalum Oxide
• Barium Strontium Titanate

Metals

• Tungsten and Tungsten Silicide
• Titanium Nitride and Barriers

Return to Tutorial Table of Contents
Book version of the CVD Tutorial