Fundamentals of Chemical Vapor Deposition: Plasmas for CVD

Survey of Plasmas and Methods of Excitation

• Introduction to Plasmas
• Capacitive Plasmas
• Capacitive Plasma Parameters
• Other Discharge Types

Implications for CVD

• Plasmas for Deposition
• Plasma Damage

Some Technical Details

• Ambipolar Diffusion
• Ion Flux and the Bohm Velocity

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Book version of the CVD Tutorial