Fundamentals of Chemical Vapor Deposition: Notation Used in the Tutorial
Gases, Kinetic Theory
                                             symbol               
                   standard                  units               
                   description               
                   alternative                  units               
                                               P               
                   Pa               
                   Pressure               
                   Torr, atm               
                                               V               
                   m3               
                   volume               
                   cm3,  liter               
                                               N               
                   moles               
                   number of moles               
                                  
                                               R               
                   J/mole K               
                   universal gas constant               
                   liter atm/mole °C,   torr liter/mole                  °C               
                                               T               
                   K               
                   temperature               
                   °C               
                                               m               
                   kg               
                   molecular mass               
                   gm,  amu               
                                               k               
                   joules/K               
                   Boltzmann's constant               
                   ev/K,  erg/K               
                                               v               
                   m/s               
                   molecular velocity               
                   cm/s               
                                               c               
                   m/s               
                   average molecular velocity (various)               
                   cm/s               
                                               J               
                   #/m2 sec               
                   flux (number crossing unit area/time)               
                   #/cm2 sec               
                                               n               
                   #/m3               
                   molecular density               
                   #/cm3               
                                               M               
                   g/mole               
                   molar mass               
                   kgm/mole               
                                               λ               
                   m               
                   mean free path               
                   cm               
                                               a               
                   m               
                   effective molecular diameter               
                   cm               
           
Reactor Analysis
                                             X               
                   [dimensionless]               
                   utilization               
                                  
                                               Rs               
                   moles/second               
                   surface reaction rate               
                   molecules/second               
                                               Ks               
                   m/sec               
                   surface reaction rate constant (first order)               
                   cm/second               
                                               S               
                   m2               
                   surface area               
                   cm2               
                                               [species]               
                   moles/m3               
                   concentration of species               
                   moles/cm3,  molecules/cm3               
                                               Q               
                   moles               
                   total reactant               
                   molecules               
                                               Fin               
                   m3/sec               
                   volumetric flow in (or out)               
                   cm3/sec               
                                               tres               
                   seconds               
                   residence time               
                                  
                                               tcon               
                   seconds               
                   consumption time               
                                  
                                               NAv               
                   #/gm mole               
                   Avogadro's number               
                                  
           
Mass Transport
                                             D               
                   m2/sec               
                   diffusion constant               
                   cm2/sec               
                                               A               
                   m2               
                   cross-sectional area               
                   cm2               
                                               Ld               
                   m               
                   diffusion length               
                   cm               
                                               L               
                   m               
                   characteristic system length               
                   cm               
                                               Pe               
                   [dimensionless]               
                   Peclet number = (feature size/diffusion                  length)^2               
                                  
                                               ρm               
                   moles/m3               
                   molar density               
                   moles/cm3               
                                               ρ               
                   kg/m3               
                   mass density               
                   g/cm3               
                                               U               
                   m/sec               
                   fluid velocity               
                   cm/sec               
                                               μ               
                   kg/m sec               
                   viscosity               
                   gm/cm sec = Poise               
                                               Re               
                   [dimensionless]               
                   Reynolds number = (feature size/momentum                  diffusion length)^2               
                                  
                                               Fsccm               
                   std. cm3/min               
                   molar flow (standard units)               
                                  
                                               H               
                   m               
                   height of chamber               
                   cm               
                                               r               
                   m               
                   radial distance               
                   cm               
                                               Rc               
                   m               
                   radius of chamber               
                   cm               
                                               Fm               
                   moles/second               
                   molar flow               
                                  
                                               C               
                   molecules/m3               
                   molar concentration               
                   moles/cm3               
                                               LTh               
                   m               
                   Thiele length               
                   cm               
                                               ν               
                   m2/sec               
                   kinematic viscosity,  μ/ρ               
                   cm2/sec               
           
Heat Transport
                                             cp               
                   J/kgm               
                   heat capacity at constant pressure               
                   J/gm               
                                               cvol               
                   J/m3               
                   volumetric heat capacity               
                   J/cm3               
                                               Kth               
                   W/m K               
                   thermal conductivity               
                   W/cm K               
                                               c                
                   m/s               
                   velocity of light               
                   cm/s               
                                               Sigma               
                   W/m2 K4               
                   Stefan-Boltzmann constant               
                   W/cm2 K4               
                                               ϵ               
                   [dimensionless]               
                   emissivity               
                                  
                                               Pm               
                   W/m2                
                   radiated power               
                   W/cm2               
                                               d               
                   m               
                   gap between planes               
                   cm               
           
Chemistry
                                             G               
                   Joules/mole               
                   free enthalpy or Gibbs Free Energy               
                   calories/mole               
                                               S               
                   Joules/mole K               
                   entropy               
                   calories/mole               
                                               E               
                   Joules/mole               
                   internal energy               
                   calories/mole               
                                               H               
                   Joules/mole               
                   enthalpy               
                   calories/mole               
                                               ΔHvap               
                   Joules/mole               
                   heat of vaporization               
                   calories/mole               
                                               Ea               
                   Joules/mole               
                   activation energy               
                   calories/mole               
                                               θ               
                   [dimensionless]               
                   fraction of occupied surface sites               
                                  
                                               RSC               
                   [dimensionless]               
                   reactive sticking coefficient                
                                  
           
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