Fundamentals of Chemical Vapor Deposition: Transport in Gaseous Media

Mass Transport

• Introduction to Transport
• Convection and Diffusion
• Diffusion: Physics and Math
• Diffusion Length
• Convection and Reynolds Number
• Plug Flow, Plug Reactor Model
• Poiseuille and Couette Flow
• Boundary Layer Flows
• Pressure and Knudsen Number

Heat Transport

• Introduction to Heat Transport
• Heat Transfer Mechanisms
• Heat Conduction and Diffusion
• Heat Conduction and Plug Flow
• Natural Convection
• Radiative Heat Transport
• Temperature Measurement

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Book version of the CVD Tutorial